| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/26/2014 | US20140175054 Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature cvd systems |
| 06/26/2014 | US20140174663 Plasma stabilization method and plasma apparatus |
| 06/26/2014 | US20140174540 ALD Process Window Combinatorial Screening Tool |
| 06/26/2014 | US20140174364 Heat treatment device |
| 06/26/2014 | US20140174362 Apparatus And Methods For Symmetrical Gas Distribution With High Purge Efficiency |
| 06/26/2014 | US20140174361 Heated backing plate |
| 06/26/2014 | US20140174359 Plasma generator and cvd device |
| 06/26/2014 | US20140174358 Magnetic Field Assisted Deposition |
| 06/26/2014 | US20140174355 Plasma cvd apparatus and vacuum treatment apparatus |
| 06/26/2014 | US20140174354 Single-and dual-chamber module-attachable wafer-handling chamber |
| 06/26/2014 | US20140174353 High-temperature grade steel for fluidized bed reactor equipment |
| 06/26/2014 | US20140174352 Apparatus for processing wafers |
| 06/26/2014 | US20140174351 Substrate position detecting apparatus, substrate processing apparatus using substrate position detecting apparatus, and deposition apparatus |
| 06/26/2014 | DE112012003201T5 Alkoxidverbindung und Rohmaterial zum Bilden eines dünnen Films Alkoxide compound and a raw material for forming a thin film |
| 06/26/2014 | DE112011105584T5 Plasmaabscheidungsvorrichtung und Plasmaabscheidungsverfahren Plasma deposition apparatus and plasma deposition process |
| 06/26/2014 | DE102012112109A1 Oberflächenveredeltes Stahlblech und Verfahren zu dessen Herstellung Surface-coated steel sheet and process for its preparation |
| 06/26/2014 | DE102010052143B4 Tiegel zur Aufnahme eines Werkstoffs, der mit einem CVD- oder PVD-Verfahren verdampft werden soll A crucible for receiving material to be evaporated with a CVD or PVD process |
| 06/25/2014 | EP2747126A1 Method for recycling a substrate holder |
| 06/25/2014 | EP2746624A1 Piston ring |
| 06/25/2014 | EP2746426A1 Vapor deposition apparatus and Method of manufacturing organic light-emitting display apparatus |
| 06/25/2014 | EP2746425A1 Thin-film formation method, thin-film formation device, object to be treated having coating film formed thereon, die and tool |
| 06/25/2014 | EP2746355A1 Plastic bar |
| 06/25/2014 | EP2745306A1 Plasma processing apparatus |
| 06/25/2014 | EP2744925A1 Reaction chamber for deposition of a semiconductor layer on the plurality substrates in batches |
| 06/25/2014 | EP2744924A1 Gas distribution system for a reaction chamber |
| 06/25/2014 | EP2744761A1 Tantalum oxide coatings |
| 06/25/2014 | EP2744760A1 Antireflection glazing unit equipped with a porous coating |
| 06/25/2014 | CN203668512U 一种改进式高纯化学品蒸发器 An improved type of high-purity chemicals evaporator |
| 06/25/2014 | CN203668511U 过滤装置及金属有机化学气相沉积设备 Filtration devices and metal organic chemical vapor deposition equipment |
| 06/25/2014 | CN203668510U 一种提高石墨舟舟车平衡的装置 A way to improve the balance of the car means graphite Zhou Zhou |
| 06/25/2014 | CN203668509U 真空涂覆设备的捕水机构 Catching water bodies vacuum coating equipment |
| 06/25/2014 | CN103890898A 采用等离子体发生器处理对象的工具和方法 Plasma generator processed using tools and methods |
| 06/25/2014 | CN103890229A 等离子体成膜装置 The plasma film forming apparatus |
| 06/25/2014 | CN103890228A 包括利用原子层沉积而沉积有材料以用于增加刚度和强度的纤维的纺织物 Including the use of atomic layer deposition and the deposited material is used to increase the stiffness and strength of the textile fibers |
| 06/25/2014 | CN103890226A 可调整的遮罩 Adjustable mask |
| 06/25/2014 | CN103887210A 基板位置检测装置、基板处理装置和成膜装置 A substrate position detection apparatus, the substrate processing apparatus and a film forming apparatus |
| 06/25/2014 | CN103883418A 一种金属复合陶瓷气缸套及其渗陶方法 One metal composite ceramic cylinder liners and infiltration methods Tao |
| 06/25/2014 | CN103882412A 采用等离子体射流制备高阻隔薄膜的方法 Preparation of high barrier films using plasma jet method |
| 06/25/2014 | CN103882411A 成膜方法 Film forming method |
| 06/25/2014 | CN103882410A Ald设备及应用于ald设备的反应源扩散分布检测与控制方法 Reaction source diffusion distribution detection and control methods applied ald Ald equipment and devices |
| 06/25/2014 | CN103882409A 源输送混合比可调气路装置 Source mixing ratio adjustable pneumatic conveying equipment |
| 06/25/2014 | CN103882408A 成膜方法 Film forming method |
| 06/25/2014 | CN103882407A 在石英基底表面制备二氧化硅膜的方法 In the bottom surface of the quartz silica film prepared in the method |
| 06/25/2014 | CN103882406A 成膜方法 Film forming method |
| 06/25/2014 | CN103882405A 起光学作用的带有透明覆盖层的层系统及其制造方法 Layer system and a method of manufacturing a transparent cover layer having the optical action of the play |
| 06/25/2014 | CN103882404A 形成相变材料的方法和形成相变存储器电路的方法 The method for forming the phase change material and a method of forming a phase change memory circuit |
| 06/25/2014 | CN103882403A 氯化钠基片上制备纳米金刚石的一种方法 A method for the preparation of nano-diamond substrate on sodium chloride |
| 06/25/2014 | CN102605349B 一种基片加热装置 A substrate heating apparatus |
| 06/25/2014 | CN102443779B 一种制备铜铟镓硒薄膜的等离子体协助硒化工艺及装置 A plasma copper indium gallium selenide thin films technology and equipment to assist selenide |
| 06/25/2014 | CN102348832B 用于稳定前驱物供应的气泡供应系统 Used to stabilize the precursor supply bubble supply system |
| 06/25/2014 | CN102292466B 利用cvd 涂覆基板的器件和方法 The use of devices and methods cvd coated substrate |
| 06/25/2014 | CN102127752B 气体处理系统 Gas treatment system |
| 06/25/2014 | CN101877304B 等离子处理装置和等离子处理方法 The plasma processing apparatus and plasma processing method |
| 06/24/2014 | US8761842 Encapsulated integrated-circuit device with thin-film battery |
| 06/24/2014 | US8759234 Deposited material and method of formation |
| 06/24/2014 | US8758890 Multilayered coated cutting tool |
| 06/24/2014 | US8758867 Neutral ligand containing precursors and methods for deposition of a metal containing film |
| 06/24/2014 | US8758856 Method of fluoridation and directions for use of a unit of fluoridation |
| 06/24/2014 | US8758851 Method for increasing the durability of glass |
| 06/24/2014 | US8758581 Combinatorial process system |
| 06/24/2014 | US8758550 Shower head and plasma processing apparatus having same |
| 06/24/2014 | US8758516 Apparatus for manufacturing flat-panel display |
| 06/24/2014 | US8758515 Delivery device and method of use thereof |
| 06/24/2014 | US8758514 Cluster type semiconductor processing apparatus |
| 06/24/2014 | US8758513 Processing apparatus |
| 06/24/2014 | US8758512 Vapor deposition reactor and method for forming thin film |
| 06/24/2014 | US8758511 Film forming apparatus and vaporizer |
| 06/24/2014 | US8757090 Gas shower plate for plasma processing apparatus |
| 06/19/2014 | WO2014092085A1 Gas barrier film, method for manufacturing same, and electronic device using same |
| 06/19/2014 | WO2014092041A1 Method for producing organic electroluminescent device |
| 06/19/2014 | WO2014091886A1 Substrate processing apparatus and method for adjusting pressure inside processing vessel |
| 06/19/2014 | WO2014090925A1 Gas mixing device |
| 06/19/2014 | WO2014090664A1 Method for making diamond layers by cvd |
| 06/19/2014 | WO2014090561A1 Surface-finished steel sheet and method for the production thereof |
| 06/19/2014 | WO2014090510A1 Vacuum chamber with inspection device |
| 06/19/2014 | WO2014089864A1 Method for preparing co-doped zinc oxide thin film through atomic layer deposition |
| 06/19/2014 | WO2014089861A1 Method for preparing nitrogen-based dual acceptor co-doped zinc oxide thin film |
| 06/19/2014 | WO2014035899A8 A method of controlling the switched mode ion energy distribution system |
| 06/19/2014 | US20140170490 Lithium secondary battery negative electrode and method for manufacturing the same |
| 06/19/2014 | US20140170410 Method for Applying a Coating to a Substrate, Coating, and Use of Particles |
| 06/19/2014 | US20140170335 Methods and Apparatus for Combinatorial PECVD or PEALD |
| 06/19/2014 | US20140170318 Methods and systems for reducing silica recession in silicon-containing materials |
| 06/19/2014 | US20140170317 Chemical vapor deposition of graphene using a solid carbon source |
| 06/19/2014 | US20140170315 Thin film depositing apparatus and thin film deposition method using the same |
| 06/19/2014 | US20140170301 Thin film deposition apparatus and method |
| 06/19/2014 | US20140170053 Low friction coating layer, low friction coating method and low friction coating apparatus |
| 06/19/2014 | US20140167006 Flexible substrate for roll-to-roll processing and method of manufacturing the same |
| 06/19/2014 | US20140166616 Combinatorial Processing Using a Remote Plasma Source |
| 06/19/2014 | US20140166049 Cleaning method of process chamber |
| 06/19/2014 | US20140165914 Organic material deposition apparatus |
| 06/19/2014 | US20140165912 Apparatus for providing plasma to a process chamber |
| 06/19/2014 | US20140165909 Manufacturing Apparatus For Depositing A Material On A Carrier Body |
| 06/18/2014 | EP2744307A2 Apparatus for plasma generation, method for manufacturing rotating electrodes for plasma generation apparatus, method for plasma treatment of substrate, and method for forming thin film of mixed structure using plasma |
| 06/18/2014 | EP2743970A1 Apparatus, method and program for manufacturing nitride film |
| 06/18/2014 | EP2743373A1 Metering unit and use of the same |
| 06/18/2014 | EP2743372A1 Delivery device for thin film deposition |
| 06/18/2014 | EP2743371A1 Deposition apparatus, method of forming thin film using the same and method of manufacturing organic light emitting display apparatus |
| 06/18/2014 | EP2743272A1 Alkoxysilylamine compounds and applications thereof |
| 06/18/2014 | EP2743092A1 Structure including thin primer film, and process for producing said structure |
| 06/18/2014 | EP2742167A1 Method and apparatus for depositing atomic layers on a substrate |