| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/16/2014 | CN103924215A 向表面施用材料的方法和设备 Methods and apparatus for applying to the surface of the material |
| 07/16/2014 | CN103924214A 一种蒸汽输送mo源连续供应系统 A steam delivery mo source continuous supply system |
| 07/16/2014 | CN103924213A 用于场发射器件的二硫化钼薄膜的制备方法 Preparation of the field emission devices used for the film of molybdenum disulfide |
| 07/16/2014 | CN103924212A 氮化硅薄膜的制备方法 Preparation of silicon nitride films |
| 07/16/2014 | CN103924211A CVD涂覆的多晶c-BN切削刀具 C-BN polycrystalline CVD coated cutting tool |
| 07/16/2014 | CN103924210A 一种等离子体沉积装置及金刚石涂层的制备方法 A method for depositing diamond coating apparatus and method for producing the plasma |
| 07/16/2014 | CN103924209A 直接在针尖表面共形覆盖石墨烯的方法 Directly on the tip surface covered with graphene conformal method |
| 07/16/2014 | CN103924208A 一种制备多层石墨烯薄膜的方法 A method of preparing a thin film multi-graphene |
| 07/16/2014 | CN103924207A 一种增强泡沫铜在较高温度下抗氧化能力的方法 An antioxidant capacity of copper foam at a higher temperature method for enhancing |
| 07/16/2014 | CN103921492A Pt-Al-Hf/Zr 涂层及方法 Pt-Al-Hf / Zr coating and method |
| 07/16/2014 | CN102978582B 一种纯钨毛细管的生产装置 A pure tungsten capillary production unit |
| 07/16/2014 | CN102828166B 化学气相沉积维修设备 Chemical vapor deposition equipment maintenance |
| 07/16/2014 | CN102762764B 具有减少的工具痕迹的用于均匀薄膜沉积的平行板反应器 Traces with reduced tool for uniform film deposition parallel plate reactor |
| 07/16/2014 | CN102686772B 由金属、硬质金属、金属陶瓷或陶瓷构成的涂覆型体以及用于涂覆这样的型体的方法 Made of metal, hard metal, cermet or ceramic shaped body and a coating method for coating such a shaped body |
| 07/16/2014 | CN102586759B 一种气体输送系统及应用该系统的半导体处理设备 The semiconductor processing apparatus of a gas delivery system, and application of the system |
| 07/16/2014 | CN102560436B 一种气相沉积设备 A gas phase deposition apparatus |
| 07/16/2014 | CN102373440B 化学气相沉积装置 Chemical vapor deposition apparatus |
| 07/16/2014 | CN102330073B 薄膜加工设备的下极板及应用该下极板的等离子体加工设备 Under the plate and applied the film processing equipment under the plate plasma processing equipment |
| 07/16/2014 | CN101792900B 二元和三元金属硫属化物材料及其制造和使用方法 Binary and ternary metal chalcogenide materials and their manufacture and use |
| 07/15/2014 | US8778814 Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device |
| 07/15/2014 | US8778813 Confined process volume PECVD chamber |
| 07/15/2014 | US8778809 Apparatus for forming a film and an electroluminescence device |
| 07/15/2014 | US8778465 Ion-assisted direct growth of porous materials |
| 07/15/2014 | US8778462 Method for producing metalized fibrous composite sheet with olefin coating |
| 07/15/2014 | US8778445 Apparatus and methods for forming modified metal coatings |
| 07/15/2014 | US8778295 Combinatorial synthesis of diamond |
| 07/15/2014 | US8778083 Lateral-flow deposition apparatus and method of depositing film by using the apparatus |
| 07/15/2014 | US8778082 Point source assembly for thin film deposition devices and thin film deposition devices employing the same |
| 07/15/2014 | US8778081 Process and hardware for deposition of complex thin-film alloys over large areas |
| 07/15/2014 | US8778080 Apparatus for double-plasma graft polymerization at atmospheric pressure |
| 07/15/2014 | US8778079 Chemical vapor deposition reactor |
| 07/15/2014 | US8778066 Vacuum pump exhaust pipe of chemical vapor deposition apparatus and relevant vacuum pump |
| 07/15/2014 | US8776720 Linear-type microwave-excited plasma source using a slotted rectangular waveguide as the plasma exciter |
| 07/15/2014 | US8776719 Microwave plasma reactor |
| 07/15/2014 | US8776717 Systems for discretized processing of regions of a substrate |
| 07/14/2014 | DE202014102847U1 Bandsubstrat-Vakuumbeschichtungsanlage Tape substrate vacuum coating system |
| 07/10/2014 | WO2014107282A1 Metal processing using high density plasma |
| 07/10/2014 | WO2014107271A1 Deposition of pure metals in 3d structures |
| 07/10/2014 | WO2014106875A1 Group-iii nitride epitaxial substrate and method for producing same |
| 07/10/2014 | WO2014078807A3 Graphene based electrodes and applications |
| 07/10/2014 | US20140193622 Grain Boundary Engineered Alpha-Alumina Coated Cutting Tool |
| 07/10/2014 | US20140193594 Metal object with diamond-like carbon film and method for forming diamond-like carbon film |
| 07/10/2014 | US20140193581 Thin film deposition apparatus |
| 07/10/2014 | US20140193579 Combination CVD/ALD method and source |
| 07/10/2014 | US20140193578 Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel |
| 07/10/2014 | US20140193289 One-dimensional titanium nanostructure and method for fabricating the same |
| 07/10/2014 | US20140191423 Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel |
| 07/10/2014 | US20140190937 System and Method for Cleaning Semiconductor Fabrication Equipment Parts |
| 07/10/2014 | US20140190581 Raw material gas supply apparatus for semiconductor manufacturing equipment |
| 07/10/2014 | US20140190411 Lid assembly for a processing system to facilitate sequential deposition techniques |
| 07/10/2014 | US20140190407 Coating a substance with graphene |
| 07/09/2014 | EP2753154A1 Antenna for plasma processing apparatus, and plasma processing apparatus using antenna |
| 07/09/2014 | EP2752869A1 Semiconductor device or crystal, and method for producing semiconductor device or crystal |
| 07/09/2014 | EP2752420A1 Raw material for chemical vapor deposition which comprises organic platinum compound, and chemical vapor deposition method using said raw material for chemical vapor deposition |
| 07/09/2014 | EP2752264A1 Surface-coated cutting tool |
| 07/09/2014 | EP2752263A1 Cutting tool |
| 07/09/2014 | EP2752261A2 Process for producing watch parts |
| 07/09/2014 | EP2752251A1 Functional film manufacturing method and functional film |
| 07/09/2014 | EP2751301A1 Improved deposition technique for depositing a coating on a device |
| 07/09/2014 | EP2751050A1 High content pcbn compact including w-re binder |
| 07/09/2014 | CN203700517U 多层喷气式金刚石膜涂层设备 Multi-jet diamond film coating equipment |
| 07/09/2014 | CN203700516U 一种用于气体预热与气体分配的组合工装 A system for the distribution of gas composition and the gas preheating tooling |
| 07/09/2014 | CN203700515U 一种密封性能优良的类金刚石膜涂层室 An excellent sealing performance of the DLC film coating chamber |
| 07/09/2014 | CN203700514U 直流励磁式类金刚石膜涂层设备 DC excitation type DLC film coating equipment |
| 07/09/2014 | CN203700513U 用于沉积工艺的防护罩 Process for depositing a shield |
| 07/09/2014 | CN203700512U 等离子体增强化学气相沉积腔室 Plasma enhanced chemical vapor deposition chamber |
| 07/09/2014 | CN203700509U 一种旋转平台机构 A rotating platform mechanism |
| 07/09/2014 | CN203697610U 氮化铟/氮化镓/玻璃结构 Indium nitride / gallium nitride / glass structure |
| 07/09/2014 | CN103918061A 结晶层叠结构体及其制造方法以及半导体元件 Crystalline laminated structure and manufacturing method and a semiconductor element |
| 07/09/2014 | CN103915328A 利用石墨烯带电在石墨烯上生长高k介质的方法 Graphene charged graphene growth on high-k dielectric Method |
| 07/09/2014 | CN103911604A 基板沉积装置的控制装置及其控制方法 The control device and control method for a substrate deposition apparatus |
| 07/09/2014 | CN103911603A 监控装置、监控方法及气相沉积设备 Monitoring devices, monitoring methods and vapor deposition equipment |
| 07/09/2014 | CN103911602A 化学气相沉积设备的控制系统 The control system of the chemical vapor deposition apparatus |
| 07/09/2014 | CN103911601A 一种喷淋板及包含该喷淋板的等离子箱 One kind of the shower plate and the shower plate comprising a plasma box |
| 07/09/2014 | CN103911600A 一种制备InP薄膜材料的方法 A method of preparing film material InP |
| 07/09/2014 | CN103911599A 一种等离子体增强化学气相沉积装置 A plasma enhanced chemical vapor deposition apparatus |
| 07/09/2014 | CN103911598A 一种金属有机化学气相沉积设备 Metal organic chemical vapor deposition equipment |
| 07/09/2014 | CN103911597A 碳化硅膜的制备方法 SiC membrane preparation |
| 07/09/2014 | CN103911596A 一种制备金刚石膜的装置及使用该装置制备金刚石膜的方法 An apparatus for the preparation and use of diamond films of diamond films prepared by the method of the device |
| 07/09/2014 | CN103911584A 一种掩膜板 One kind of mask |
| 07/09/2014 | CN102800419B 石墨烯导电膜结构的制备方法 Preparation graphene conductive film structure |
| 07/09/2014 | CN102569531B 一种多晶硅片的钝化处理方法 Passivation of polycrystalline silicon wafer processing method |
| 07/09/2014 | CN102433539B 腔系列 Cavity Series |
| 07/09/2014 | CN102395714B 外延反应器的反应室和使用所述室的反应器 The reaction chamber and the chamber of an epitaxial reactor using a reactor |
| 07/09/2014 | CN102124140B 阱 Trap |
| 07/09/2014 | CN102016117B 制备导电材料的方法及包括导电材料的器件 Method and device for preparing a conductive material comprising a conductive material |
| 07/09/2014 | CN101449341B 超导薄膜材料及其制造方法 Superconducting thin film material and manufacturing method thereof |
| 07/08/2014 | US8772682 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber |
| 07/08/2014 | US8772524 CVD precursors |
| 07/08/2014 | US8772053 Method and device for repairing open line defect in liquid crystal display array substrate |
| 07/08/2014 | US8771806 Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma |
| 07/08/2014 | US8771791 Deposition of layer using depositing apparatus with reciprocating susceptor |
| 07/08/2014 | US8771483 Combinatorial process system |
| 07/08/2014 | US8771461 Plasma processing apparatus |
| 07/08/2014 | US8771423 Low sloped edge ring for plasma processing chamber |
| 07/08/2014 | US8771422 Coating method and apparatus, a permanent magnet, and manufacturing method thereof |
| 07/08/2014 | US8771421 Entrance and exit roll seal configuration for a vapor deposition system |
| 07/08/2014 | US8771420 Substrate processing apparatus |
| 07/08/2014 | US8771419 Roll to roll evaporation tool for solar absorber precursor formation |
| 07/08/2014 | US8771418 Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion plates |