Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
03/2011
03/03/2011WO2011023512A1 Cvd method and cvd reactor
03/02/2011EP2290136A1 Method for achieving improved epitaxy quality (surface texture and defect densitity) on free-standing (aluminum, indium, gallium) nitride ((Al, In, Ga)N) substrates for opto-electronic and electronic devices
03/02/2011EP2290135A1 Method for achieving improved epitaxy quality (surface texture and defect densitity) on free-standing (aluminum, indium, gallium) nitride ((Al, In, Ga)N) substrates for opto-electronic and electronic devices
03/02/2011EP2290123A1 Processes for producing thin metal nitride layers, inter alia making use of a selective decomposition of alcoholates, processes for hardening a surface, for obtaining thin oxygen compound layers, articles comprising said layers and uses thereof, and a process for obtaining metal hydrides and aldehydes/ketones
03/02/2011EP1536043B1 N-type semiconductor diamond producing method and semiconductor diamond
03/02/2011CN201753372U Load-bearing disc for production of epitaxial wafer
03/02/2011CN201753371U Cover for production of epitaxial wafer
03/01/2011US7897938 Scintillator panel
03/01/2011US7896965 Method for the production of a plurality of optoelectronic semiconductor chips and optoelectronic semiconductor chip
02/2011
02/24/2011WO2011022637A1 Dual heating for precise wafer temperature control
02/24/2011WO2010129718A3 Method and reactor for growing gallium nitride crystals using ammonia and hydrogen chloride
02/24/2011US20110045281 Reduction of basal plane dislocations in epitaxial sic
02/24/2011DE102010026987A1 Herstellvorrichtung und -verfahren für Halbleiterbauelement Fabrication and method for semiconductor device
02/23/2011EP2287368A2 Apparatus and method for producing (Ai, Ga, In)N material using an in-situ laser for parting this material
02/23/2011EP2286459A1 Ultratough single crystal boron-doped diamond
02/23/2011EP2286006A1 Methods and apparatus for deposition reactors
02/22/2011US7893454 Method for producing structured substrate, structured substrate, method for producing semiconductor light emitting device, semiconductor light emitting device, method for producing semiconductor device, semiconductor device, method for producing device, and device
02/22/2011US7893433 Thin films and methods of making them
02/22/2011US7892970 Alternative methods for fabrication of substrates and heterostructures made of silicon compounds and alloys
02/22/2011US7892879 Manufacture of cadmium mercury telluride on patterned silicon
02/17/2011US20110039071 METHOD OF MANUFACTURING A Si(1-v-w-x)CwAlxNv SUBSTRATE, METHOD OF MANUFACTURING AN EPITAXIAL WAFER, Si(1-v-w-x)CwAlxNv SUBSTRATE, AND EPITAXIAL WAFER
02/17/2011US20110036395 Methods for forming nanostructures and photovoltaic cells implementing same
02/17/2011US20110036289 Method for growing germanium epitaxial films
02/16/2011EP2284298A2 Optical quality diamond material
02/16/2011EP2284297A1 Method for achieving improved epitaxy quality (surface texture and defect density) on free-standing (aluminium, indium, gallium) nitride ((AI, In,Ga)N) substrates for opto-electronic and electronic devices
02/16/2011CN1782142B Wafer guide, MOCVD equipment, and nitride semiconductor growth method
02/16/2011CN101120122B Gas distribution showerhead featuring exhaust apertures
02/15/2011US7888235 Fabrication of substrates with a useful layer of monocrystalline semiconductor material
02/15/2011US7887936 Substrate with determinate thermal expansion coefficient
02/15/2011US7887883 Composition and method for low temperature deposition of silicon-containing films
02/15/2011US7887632 Process for producing monocrystal thin film and monocrystal thin film device
02/15/2011US7887628 Chemical vapor deposited diamond having a thickness of >2 mm of high purity/quality; single impurity of not greater than 1 ppm and a total impurity content of not greater than 5 ppm; high value electron mobility, wide band gap device; anvils
02/10/2011WO2011017439A1 Critical current density enhancement via incorporation of nanoscale ba2renbo6 in rebco films
02/10/2011WO2011016828A2 Large area deposition of graphene hetero-epitaxial growth, and products including the same
02/10/2011US20110031531 Process for forming low defect density heterojunctions
02/10/2011US20110030610 High-productivity porous semiconductor manufacturing equipment
02/10/2011DE10320133B4 Verfahren zur Herstellung von einkristallinen oder quasi-einkristallinen Diamantschichten und auf einem Körper angeordnete einkristalline oder quasi-einkristalline Diamantschicht A process for the production of single crystalline or quasi-single-crystalline diamond layers and arranged on a body monocrystalline or quasi-monocrystalline diamond layer
02/09/2011EP2281300A2 Methods and apparatus for a chemical vapor deposition reactor
02/09/2011CN101967680A Method for preparing monoclinic gallium oxide single-crystal film on magnesium oxide substrate
02/09/2011CN101967679A Method and adjusting and controlling appearance of zinc oxide whisker
02/09/2011CN101388330B Semiconductor manufacture device and method by heating substrate
02/08/2011US7883998 Vapor phase growth method
02/03/2011WO2011014408A1 Nanowire synthesis
02/03/2011US20110026103 Crystal for optical conversion
02/02/2011CN101962806A Preparation method of flexible cold cathode material
02/02/2011CN101962804A Epitaxial material stress control-based GaN thick film self-separation method
02/02/2011CN101962803A Heteroepitaxial growth method for high-quality monocrystalline thick-film material
02/02/2011CN101962802A Method for growing GeSn alloy on Si substrate by molecular beam epitaxy
02/02/2011CN101311361B Chinese character 'zhi-shaped' nano-belt of periodic SnO2 and method for preparing same
02/02/2011CN101303998B Plasma processing apparatus, focus ring, and susceptor
02/01/2011US7879148 System and method for producing synthetic diamond
02/01/2011US7879147 Large area, uniformly low dislocation density GaN substrate and process for making the same
01/2011
01/27/2011US20110017127 Apparatus and method for producing epitaxial layers
01/27/2011US20110017126 Coloured diamond
01/26/2011EP2277696A2 Vacinal gallium nitride substrate for high quality homoepitaxy
01/26/2011CN101956232A Polycrystalline silicon producing method, apparatus for producing polycrystalline silicon, and polycrystalline silicon
01/26/2011CN101481818B Heating device for micro-area controllable nano functional material synthesis
01/26/2011CN101072900B CVD reactor comprising an rf-heated treatment chamber
01/25/2011US7875536 Nanostructures formed of branched nanowhiskers and methods of producing the same
01/25/2011US7875118 Crystallization method and crystallization apparatus
01/20/2011WO2011007762A1 Process for production of laminate having aluminum nitride monocrystal layer, laminate produced by the process, process for production of aluminum nitride monocrystal substrate using the laminate, and aluminum nitride monocrystal substrate
01/20/2011WO2011007494A1 Method for manufacturing semiconductor epitaxial wafer, and semiconductor epitaxial wafer
01/20/2011US20110014112 Method for growing monocrystalline diamonds
01/20/2011US20110012172 Semiconductor Heterostructures Having Reduced Dislocation Pile-Ups and Related Methods
01/20/2011US20110011332 Method and apparatus for producing large, single-crystals of aluminum nitride
01/19/2011EP2276061A1 PROCESS FOR PRODUCING SI(1-V-W-X)CWALXNV BASE MATERIAL, PROCESS FOR PRODUCING EPITAXIAL WAFER, SI(1-V-W-X)CWALXNV BASE MATERIAL, AND EPITAXIAL WAFER& xA;
01/19/2011EP2276060A1 PROCESS FOR PRODUCING SI(1-V-W-X)CWALXNV BASE MATERIAL, PROCESS FOR PRODUCING EPITAXIAL WAFER, SI(1-V-W-X)CWALXNVBASE MATERIAL, AND EPITAXIAL WAFER & xA;
01/19/2011EP2276059A1 Method of controlling stress in gallium nitride films deposited on substrates
01/19/2011EP2274457A1 Apparatus and methods for deposition reactors
01/19/2011CN101952490A Laminate and process for producing the laminate
01/19/2011CN101949058A Group III nitride semiconductor free-standing substrate and method of manufacturing the same, group III nitride semiconductor device and method of manufacturing the same
01/13/2011WO2011004726A1 Method for manufacturing nitride semiconductor substrate
01/13/2011US20110008568 Oriented noble metal single crystalline nanowire and preparation method thereof
01/13/2011US20110005454 Plasma Reactor, and Method for the Production of Monocrystalline Diamond Layers
01/12/2011EP2126161B1 Device and method for selectively depositing crystalline layers using mocvd or hvpe
01/12/2011EP2016209B1 Process for producing a iii-n bulk crystal and a free-standing iii -n substrate, and iii -n bulk crystal and free-standing iii-n substrate
01/12/2011CN101942696A Si-base reversed extension 3C-SiC monocrystal film and preparation method thereof
01/12/2011CN101323975B Method for preparing SnO2-ZnO alloplasm nanobranch
01/11/2011US7867881 Method of manufacturing nitride semiconductor substrate
01/06/2011WO2011001782A1 Group iii nitride crystal and production method thereof
01/06/2011US20110000425 Method of manufacturing semiconductor device, method of manufacturing substrate, and substrate processing apparatus
01/05/2011EP1043763B1 Vapor growth apparatus for semiconductor wafers with dopant gas feed assembly
01/05/2011DE102009030296A1 Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe A process for producing an epitaxially coated semiconductor wafer,
01/05/2011DE102009030295A1 Verfahren zur Herstellung einer Halbleiterscheibe A process for producing a semiconductor wafer
01/04/2011US7863178 Method for manufacturing a GaN based optical device
01/04/2011US7862790 High temperature, high strength composite nanostructure metal carbides, formed by heating carbon nanotubes with reactive gases to form in situ
01/04/2011CA2466077C Apparatus and method for diamond production
12/2010
12/30/2010US20100329965 Diamond material
12/30/2010US20100329962 Diamond material
12/30/2010US20100327228 Group iii nitride semiconductor epitaxial substrate and method for manufacturing the same
12/29/2010WO2010149777A1 Method for making fancy orange coloured single crystal cvd diamond and product obtained
12/29/2010EP2267762A2 Semiconductor heterostructures having reduced dislocation pile-ups and related methods
12/29/2010EP2267190A1 Large area, uniformly low dislocation density gan substrate and process for making the same
12/29/2010EP2267189A1 High surface quality gan wafer and method of fabricating same
12/29/2010CN101928990A Epitaxial growth method of GeSn alloy
12/29/2010CN101060102B Nitride semiconductor substrate, method of making the same and epitaxial substrate for nitride semiconductor light emitting device
12/29/2010CA2765804A1 Method for making fancy orange coloured single crystal cvd diamond and product obtained
12/28/2010US7858181 Growth of single crystal nanowires
12/28/2010US7857907 Methods of forming silicon nanocrystals by laser annealing
12/23/2010WO2010145969A1 Method for equipping an epitaxy reactor
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