| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/04/2014 | US20140246429 Food container having nanostructured hydrophobic surface and manufacturing method thereof |
| 09/04/2014 | US20140246422 Heating Configuration for Use in Thermal Processing Chambers |
| 09/04/2014 | US20140245956 Cvd apparatus, method of manufacturing susceptor using the cvd apparatus, and susceptor |
| 09/04/2014 | DE102013203648A1 Verfahren und vorrichtung zur plasmabehandlung von hohlkörpern Method and apparatus for plasma treatment of hollow bodies |
| 09/04/2014 | DE102013102074A1 Anlage und Verfahren zur Beschichtung von Substraten mit polykristallinem Silizium System and method for coating substrates with polycrystalline silicon |
| 09/04/2014 | DE102013101706A1 CVD-Vorrichtung sowie Verfahren zum Reinigen einer Prozesskammer einer CVD-Vorrichtung CVD apparatus and method for cleaning a process chamber of a CVD apparatus |
| 09/02/2014 | US8822833 Touch sensor assembly and method of making the same |
| 09/02/2014 | US8822350 Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus |
| 09/02/2014 | US8821990 DLC film-forming method and DLC film |
| 09/02/2014 | US8821987 Combinatorial processing using a remote plasma source |
| 09/02/2014 | US8821986 Activated silicon precursors for low temperature deposition |
| 09/02/2014 | US8821977 Transporting device, in particular for transporting sheet-like substrates through a coating installation |
| 09/02/2014 | US8821976 Method for elaborating carbon nanotubes on a substrate |
| 09/02/2014 | US8821975 Method for making branched carbon nanotubes |
| 09/02/2014 | US8821974 Substrate processing method |
| 09/02/2014 | US8821961 MgO-based coating for electrically insulating semiconductive substrates and production method thereof |
| 09/02/2014 | US8821960 Apparatus for slot die setup and control during coating |
| 09/02/2014 | US8821773 Graphene composite electrodes for energy storage devices |
| 09/02/2014 | US8821684 Substrate plasma processing apparatus and plasma processing method |
| 09/02/2014 | US8821683 Substrate processing apparatus and method, and program and storage medium |
| 09/02/2014 | US8821682 Electron induced chemical etching and deposition for local circuit repair |
| 09/02/2014 | US8821642 Apparatus for manufacturing flat-panel display |
| 09/02/2014 | US8821641 Nozzle unit, and apparatus and method for treating substrate with the same |
| 09/02/2014 | US8821640 Solid precursor-based delivery of fluid utilizing controlled solids morphology |
| 09/02/2014 | US8821638 Continuous deposition apparatus |
| 09/02/2014 | US8821637 Temperature controlled lid assembly for tungsten nitride deposition |
| 09/02/2014 | US8821099 Load port module |
| 08/28/2014 | WO2014131002A1 Contact resistance reduction in finfets |
| 08/28/2014 | WO2014130673A1 Apparatus and methods for injector to substrate gap control |
| 08/28/2014 | WO2014130672A1 Apparatus and methods for differential pressure chucking of substrates |
| 08/28/2014 | WO2014130670A1 Apparatus and methods for carousel atomic layer deposition |
| 08/28/2014 | WO2014130527A1 Atomic layer deposition of metal alloy films |
| 08/28/2014 | WO2014130510A1 Method and system for plasma-assisted ion beam processing |
| 08/28/2014 | WO2014130304A1 Hdd patterning using flowable cvd film |
| 08/28/2014 | WO2014129746A1 Surface modification method |
| 08/28/2014 | WO2014127644A1 Barrier film and methods of making same |
| 08/28/2014 | WO2013154504A3 Microwave plasma chemical vapour deposition apparatus |
| 08/28/2014 | US20140242808 Semiconductor device manufacturing method and substrate processing system |
| 08/28/2014 | US20140242410 Electrode for a deposition process, and method for manufacturing same |
| 08/28/2014 | US20140242365 Method and Device for Manufacturing a Barrier Layer on a Flexible Substrate |
| 08/28/2014 | US20140242364 Polycarbonate compositions having good metallizability |
| 08/28/2014 | US20140242298 Nickel bis diazabutadiene precursors, their synthesis, and their use for nickel containing films depositions |
| 08/28/2014 | US20140238302 Apparatus for depositing atomic layer |
| 08/28/2014 | DE112012004880T5 Kammerdichtungselement Chamber sealing element |
| 08/28/2014 | DE112012004853T5 Mehrkammer-Akustiksensor zum Bestimmen einer Gaszusammensetzung Multi-chamber acoustic sensor for determining a gas composition |
| 08/28/2014 | DE102013101777A1 Vorrichtung zum Be- und Entladen einer CVD-Anlage Apparatus for loading and unloading of a CVD system |
| 08/27/2014 | EP2769003A1 A single crystal high dielectric constant material |
| 08/27/2014 | EP2768999A2 Drill having a coating |
| 08/26/2014 | US8816447 Transistor with reduced depletion field width |
| 08/26/2014 | US8815737 Method for forming NiSi film, method for forming silicide film, method for forming metal film for use in silicide-annealing, apparatus for vacuum processing and film-forming apparatus |
| 08/26/2014 | US8815711 Manufacturing apparatus and method for semiconductor device and cleaning method of manufacturing apparatus for semiconductor |
| 08/26/2014 | US8815678 Method for fabricating a metal-insulator-metal (MIM) capacitor having capacitor dielectric layer formed by atomic layer deposition (ALD) |
| 08/26/2014 | US8815616 Slit valve unit and film forming apparatus having the same |
| 08/26/2014 | US8815344 Selective atomic layer depositions |
| 08/26/2014 | US8815343 Highly conductive and stable transparent conducting polymer films |
| 08/26/2014 | US8815342 Process for forming a protective coating on the surface of a metal part |
| 08/26/2014 | US8815341 Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof |
| 08/26/2014 | US8815332 Connecting and bonding adjacent layers with nanostructures |
| 08/26/2014 | US8815329 Delivered energy compensation during plasma processing |
| 08/26/2014 | US8815326 Temperature telemetry in processing of material |
| 08/26/2014 | US8815325 Medicinal inhalation device |
| 08/26/2014 | US8815168 Carbon nanotube synthesizing apparatus |
| 08/26/2014 | US8815123 Fabrication method for ibiiiavia-group amorphous compound and ibiiiavia-group amorphous precursor for thin-film solar cells |
| 08/26/2014 | US8815047 Plasma chemical reactor |
| 08/26/2014 | US8815016 Heating unit and substrate processing apparatus having the same |
| 08/26/2014 | US8815015 Apparatus and method for fabricating organic light emitting diode display device |
| 08/26/2014 | US8815014 Method and system for performing different deposition processes within a single chamber |
| 08/26/2014 | US8815013 Method and system for isolated and discretized process sequence integration |
| 08/26/2014 | US8813677 Composite particulate preparing apparatus and method |
| 08/21/2014 | WO2014127363A1 Apparatus and process containment for spatially separated atomic layer deposition |
| 08/21/2014 | WO2014127102A1 Variable-temperature material growth stages and thin film growth |
| 08/21/2014 | WO2014125284A1 Method for the manufacturing of carbon coated nanoparticles |
| 08/21/2014 | WO2014125068A1 Production process of solid support metal catalyst composites |
| 08/21/2014 | US20140235066 Method of manufacturing semiconductor device and method of cleaning processing vessel |
| 08/21/2014 | US20140235003 Vapor deposition apparatus, deposition method, and method of manufacturing organic light-emitting display apparatus by using the same |
| 08/21/2014 | US20140234556 Microwave plasma reactors and substrates for synthetic diamond manufacture |
| 08/21/2014 | US20140234550 Atomic layer deposition of transition metal thin films |
| 08/21/2014 | US20140231550 Gas distributor for a CVD reactor |
| 08/21/2014 | US20140230734 Deposition apparatus |
| 08/21/2014 | US20140230731 Installation for depositing films onto a substrate |
| 08/21/2014 | US20140230730 Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition |
| 08/21/2014 | US20140230728 Vacuum processing apparatus |
| 08/21/2014 | DE102013101586A1 Mehrschichtige Schattenmaske Multilayer shadow mask |
| 08/21/2014 | DE102013101534A1 Gasverteiler für einen CVD-Reaktor Gas distributor for a CVD reactor |
| 08/21/2014 | DE102013002911A1 Dekorative, tiefschwarze Beschichtung Decorative, deep black coating |
| 08/20/2014 | EP2768013A1 Crystal layered structure and method for manufacturing same, and semiconductor element |
| 08/20/2014 | EP2767612A1 Cvd device, method for manufacturing susceptor in which cvd device is used, and susceptor |
| 08/20/2014 | EP2767611A1 Vapor deposition apparatus, deposition method, and method of manufacturing organic light-emitting display apparatus by using the same |
| 08/20/2014 | EP2767337A1 Solid support metal catalyst composites |
| 08/20/2014 | EP2766507A1 Method for the chemical vapor infiltration of refractive substances |
| 08/19/2014 | US8809204 Method of manufacturing semiconductor device and substrate processing apparatus |
| 08/19/2014 | US8808972 Optical films and methods of making the same |
| 08/19/2014 | US8808799 Method and apparatus for organic vapor printing |
| 08/19/2014 | US8808797 Method of manufacturing a gas barrier plastic container |
| 08/19/2014 | US8808793 Disc vapor lubrication |
| 08/19/2014 | US8808790 Method for manufacturing a submillimetric electrically conductive grid coated with an overgrid |
| 08/19/2014 | US8808788 Processing a wafer with a post application bake (PAB) procedure |
| 08/19/2014 | US8808496 Plasma tuning rods in microwave processing systems |
| 08/19/2014 | US8808457 Apparatus for depositing a multilayer coating on discrete sheets |
| 08/19/2014 | US8808456 Film deposition apparatus and substrate process apparatus |