Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
08/2014
08/06/2014CN103974918A 基于碳SiOC的碱金属阻挡层 Carbon-based SiOC alkali metal barrier layer
08/06/2014CN103972010A 用于衬底处理腔室的气体供应系统及其方法 The method for a gas supply system and the substrate processing chamber
08/06/2014CN103966621A 一种布拉格反射镜增强InGaN电极、制备与利用 One kind Bragg reflector to enhance InGaN electrode preparation and use
08/06/2014CN103966576A 基板处理装置、半导体器件的制造方法及程序 Substrate processing apparatus, method and program of manufacturing a semiconductor device
08/06/2014CN103966575A 基板处理装置及成膜方法 Film substrate processing apparatus and method
08/06/2014CN103966574A 气相生长装置及气相生长方法 Vapor phase growth apparatus and vapor growth method
08/06/2014CN103966573A 用于pecvd薄膜沉积的气体反应装置和方法 Pecvd gas for thin film deposition apparatus and method for reaction
08/06/2014CN103966572A 卷对卷式原子层沉积设备及其使用方法 Roll-to-roll atomic layer deposition apparatus and method of use
08/06/2014CN103966571A 用于切削刀具的涂层 Coatings for cutting tools
08/06/2014CN103966570A 单晶In<sub>2</sub>Te<sub>3</sub>纳米线及其制备以及准一维In<sub>2</sub>Te<sub>3</sub>纳米结构的宽谱光探测器及其制备 Monocrystalline In <sub> 2 </ sub> Te <sub> 3 </ sub> nanowires and their preparation as well as quasi-one-dimensional In <sub> 2 </ sub> Te <sub> 3 </ sub> nanostructures broad-spectrum light detector and preparation
08/06/2014CN103966569A 一种半导体设备的真空控制系统及真空控制方法 Vacuum control system for semiconductor devices and vacuum control method
08/06/2014CN103966551A 一种解决高温下衬底原子蒸发影响平整度的方法及装置 A method and apparatus for high temperature evaporation influence substrate atomic flatness solve
08/06/2014CN103966550A 用于薄膜沉积工艺的装置 Means for thin film deposition process
08/06/2014CN103962816A 表面包覆切削工具及其制造方法 Surface-coated cutting tool and its manufacturing method
08/06/2014CN103480043B 一种医用多孔钽植入材料及其制备方法 A porous tantalum implant material and method for medical
08/06/2014CN102618840B 传送腔室接口用的浮动狭缝阀 Floating slit valve interfaces with the transfer chamber
08/06/2014CN102177274B 汽相沉积系统 Vapor deposition system
08/06/2014CN102160183B 半导体装置 Semiconductor device
08/06/2014CN101903560B 用于电解质膜的溅射靶的方法 A method for the electrolyte membrane of the sputtering target
08/05/2014US8796483 Cyclic metal amides and vapor deposition using them
08/05/2014US8795856 Nickel thin film, method for formation of the nickel thin film, ferromagnetic nano-junction element, method for producing the ferromagnetic nano-junction element, thin metallic wire, and method for formation of the thin metallic wire
08/05/2014US8795845 Low-temperature synthesis of integrated coatings for corrosion resistance
08/05/2014US8795793 Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition
08/05/2014US8795773 Nano-particle loaded metal oxide matrix coatings deposited via combustion deposition
08/05/2014US8795772 Method of forming nano-pads of catalytic metal for growth of single walled carbon nanotubes
08/05/2014US8795771 ALD of metal-containing films using cyclopentadienyl compounds
08/05/2014US8795479 Wafer clamp assembly for holding a wafer during a deposition process
08/05/2014US8795467 Plasma processing apparatus and method
08/05/2014US8795447 Metallurgically bonded stainless steel
08/05/2014US8795435 Susceptor, coating apparatus and coating method using the susceptor
08/05/2014US8795434 Method and apparatus for mass production of graphene and carbon tubes by deposition of carbon atoms, on flat surfaces and inside walls of tubes, generated from dissociation of a carbon-containing gas stimulated by a tunable high power pulsed laser
08/05/2014US8795433 Substrate processing apparatus
07/2014
07/31/2014WO2014116967A1 Green colored refractory coatings for cutting tools
07/31/2014WO2014116520A1 Cascaded plasma reactor
07/31/2014WO2014114844A1 Method and apparatus for ald processing particulate material
07/31/2014WO2014114412A1 Coated wire for bonding applications
07/31/2014WO2014114360A1 Substrate carrier arrangement and method for holding a substrate
07/31/2014WO2014059227A3 Coating apparatus
07/31/2014WO2012106791A8 Engine component
07/31/2014US20140213130 Carbon nanotube-based robust steamphobic surfaces
07/31/2014US20140212600 Common deposition platform, processing station, and method of operation thereof
07/31/2014US20140212599 Deposition source with adjustable electrode
07/31/2014US20140212583 Method and device for continuously coating substrates
07/31/2014US20140212534 Fabrication of High-Throughput Nano-Imprint Lithography Templates
07/31/2014US20140209562 Plasma activated conformal film deposition
07/31/2014US20140209026 Plasma activated deposition of a conformal film on a substrate surface
07/31/2014US20140209023 Gas supply device, processing apparatus, processing method, and storage medium
07/31/2014US20140209022 Raw material gas supply device, film forming apparatus, raw material gas supply method, and non-transitory storage medium
07/31/2014US20140209021 Raw material gas supply device, film forming apparatus, flow rate measuring method, and non-transitory storage medium
07/31/2014US20140208659 Coatings for cutting tools
07/31/2014US20140208565 Gas separation by adjustable separation wall
07/31/2014DE102014201554A1 Dampfphasenepitaxievorrichtung und Dampfphasenepitaxieverfahren Dampfphasenepitaxievorrichtung and vapor phase epitaxy
07/31/2014DE102014100092A1 CVD-Anlage mit Partikelabscheider CVD system with particle
07/31/2014DE102013201388A1 Verfahren zur Herstellung eines Metall-Kunststoff-Hybridbauteils A method for producing a metal-plastic hybrid component
07/31/2014DE102013113501A1 Beschichtungen für Schneidwerkzeuge Coatings for cutting tools
07/31/2014DE102013100767A1 Transportsystem einer Vakuumbehandlungsanlage Transport system for vacuum treatment plant
07/30/2014EP2759360A1 Surface-coated cutting tool
07/30/2014EP2758562A1 Carousel carrier for a vacuum treatment installation
07/30/2014EP2758350A1 Process for forming a silica coating on a glass substrate
07/30/2014EP2758171A1 Method for the photocatalytically active coating of surfaces
07/30/2014CN203741413U 一种石墨纽扣 Graphite button
07/30/2014CN203741412U 一种原子层薄膜沉积进气装置 An atomic layer thin film deposition apparatus of the intake
07/30/2014CN203741411U 一种pecvd进气结构 One kind pecvd intake structure
07/30/2014CN203741408U 镀膜基片架 Coating the substrate holder
07/30/2014CN103959484A 制造硅异质结太阳能电池的方法与设备 Manufacture silicon heterojunction solar cell method and apparatus
07/30/2014CN103958733A 用于多通道流量比率控制器系统的方法和装置 Method and apparatus for multi-channel flow ratio controller system
07/30/2014CN103958732A 用于通过化学气相沉积方法制造材料的沉积盒 For the manufacture of the material by a chemical vapor deposition method for deposition box
07/30/2014CN103958731A 通过常压化学气相沉积沉积氧化硅 Depositing silicon oxide deposited by atmospheric chemical vapor
07/30/2014CN103958730A 用于合成石墨烯的薄金属膜及利用其的石墨烯制造方法 A thin metal film for the synthesis of graphene using its manufacturing method of the graphene
07/30/2014CN103958728A 涂覆用于油气钻井、完井和开采操作中的管状装置的方法 The method for coating oil and gas well drilling, completion and production operations in a tubular apparatus
07/30/2014CN103958529A 制备三烷基镓化合物的方法 The method for preparing trialkyl gallium compound
07/30/2014CN103958528A 用于制备iiia族金属的三烷基化合物的方法 Methods for the preparation of trialkyl compounds of a metal of Group iiia
07/30/2014CN103958098A 表面被覆切削工具及其制造方法 The surface-coated cutting tool and its manufacturing method
07/30/2014CN103952686A 一种防断裂的热丝化学气相沉积系统及在大尺寸bdd电极制备中的应用 A hot filament chemical vapor deposition system and application faults in large-size electrodes in the preparation of anti-bdd
07/30/2014CN103952685A 铟镓铝氮材料组分及掺杂能自由组合的mocvd生长气路及方法 Indium gallium aluminum material components and mocvd nitrogen gas line growth and doping methods can be freely combined
07/30/2014CN103952684A Led外延层生长方法及led外延层 Led epitaxial layer growth method and led epitaxial layer
07/30/2014CN103952683A 含有SiN<sub>x</sub>插入层的半极性m面GaN基的半导体器件的制备方法 Preparation containing SiN <sub> x </ sub> Semi-polar m-plane GaN-based intervening layer of a semiconductor device
07/30/2014CN103952682A 化学气相沉积生长单层二硫化钼的方法 Chemical vapor deposition growth method of a single layer of molybdenum disulfide
07/30/2014CN103952681A 一种锂氮共掺杂金刚石薄膜的制备方法 A lithium nitrogen co-doped diamond thin film preparation
07/30/2014CN103952680A 在基材表面上以气相沉积制备硅层的方法 On the surface of the substrate at a vapor deposition method for the preparation of a silicon layer
07/30/2014CN103952679A 一种mocvd纳米镍涂层及其制备装置 One kind mocvd nano nickel coating and preparation equipment
07/30/2014CN103562435B 发光分析装置 Emission analyzer
07/30/2014CN102839362B 一种基片处理设备 A substrate processing apparatus
07/30/2014CN102627004B 用于超高密度探针存储的多层相变薄膜及其制备方法 For ultra-high density multi-probe storage phase change film and preparation method
07/30/2014CN102618841B 一种硼掺杂玻璃炭材料及其制备方法 One boron-doped glass carbon material and its preparation method
07/30/2014CN102549194B 表面波等离子体cvd设备以及成膜方法 Surface wave plasma deposition method and apparatus cvd
07/30/2014CN102485953B 托盘装置及结晶膜生长设备 Pallet and crystalline film growth equipment
07/30/2014CN102482771B 用于气相沉积的含钛前体 For the vapor deposition of titanium-containing precursor
07/30/2014CN102086513B 用于沉积含第4族金属的薄膜的液体前体 Depositing a thin film of liquid precursor containing a metal of Group 4 used
07/30/2014CN102051597B 成膜装置和成膜方法 Film forming apparatus and film forming method
07/30/2014CN102002684B 滑动部件 Sliding member
07/30/2014CN101517127B 涂覆的切削工具 The coated cutting tool
07/29/2014US8791449 Nanostructured silicon for battery anodes
07/29/2014US8791044 Doped titanium dioxide as a visible and sun light photo catalyst
07/29/2014US8791031 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
07/29/2014US8791030 Coating treatment method and coating treatment apparatus
07/29/2014US8790790 Metallurgically bonded stainless steel
07/29/2014US8790750 Thin film deposition apparatus
07/29/2014US8790743 Method for controlling cyclic plasma-assisted process
07/29/2014US8790742 Method for manufacturing 3D circuits from bare die or packaged IC chips by microdispensed interconnections
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